Silicon based replication technology of 3D-microstructures by conventional CD-injection molding techniques

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1415-1418

  Larsson, Olle ^a   Ohman, Ove ^a   Billman, Ake ^a   Lundbladh, Lars ^a   Lindell, Curt ^a   Palmskog, Goran ^a  

^a ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DISKS; ELECTROFORMING; FABRICATION; INJECTION MOLDING; METALLOGRAPHIC MICROSTRUCTURE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; THREE DIMENSIONAL; X RAY LITHOGRAPHY;

REPLICATION; THREE DIMENSIONAL MICROSTRUCTURE;

SILICON;

EID: 0030648185     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)