Molecular dynamics simulations of Cl2+ impacts onto a chlorinated silicon surface: Energies and angles of the reflected Cl2 and Cl fragments

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2759-2770

  Helmer, B A ^a   Graves, D B ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033449308     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581942     Document Type: Article

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