Diagnostics and modeling of a hollow-cathode arc deposition plasma

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 755-765

  Buuron, A ^a   Koch, F ^a   Nothe M ^a   Bolt, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Amorphous carbon deposition; Electric probe measurements; Hollow cathode arc plasma; Mass spectrometry; Numerical modeling

Indexed keywords

AMORPHOUS MATERIALS; CARBON; DISSOCIATION; MAGNETIC FIELD EFFECTS; MASS SPECTROMETRY; MATHEMATICAL MODELS;

ELECTRIC PROBE MEASUREMENT; HOLLOW CATHODE ARC DEPOSITION PLASMAS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CARBON; COATING; MATHEMATICAL MODELING; PLASMA TREATMENT;

EID: 0033401265     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00210-8     Document Type: Conference Paper

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