Optical emission spectroscopy in reactive hollow cathode arc discharge plasmas - Local distribution of active species during the deposition of hard carbon films

Fresenius' Journal of Analytical Chemistry

Volumn 355, Issue 3-4, 1996, Pages 244-246

  Hemel, V ^a   Bolt, H ^a   Koch, F ^a   Nickel, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; ELECTRIC ARCS; EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS;

EXPERIMENTAL STUDY; HOLLOW CATHODES; OPTICAL SPECTROMETRY; PROCEEDINGS;

PLASMA SOURCES;

EID: 0030376757     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s0021663550244     Document Type: Article

References (7)

1. DebRoy T, Kumar S, Tankala K (1994) Diamond Rel Mater. 4:69-75
2. Pospieszczyk A, Chevalier G, Hirooka Y, Conn RW, Doerner R, Schmitz L (1992) Nucl Instr Meth Phys Res B72:207-223
3. Ra Y, Pospieszczyk A, Hirooka Y, Leung WK, Conn RW (1990) J Vac Sci Technol A8:1783-1789
4. Bolt H, Hemel V, Nickel H, Tanaka S (1995) Surf Coat Technol 74-75:188-194
5. Bolt H, Hemel V, Koch F, Nickel H, Wiechers C, Avni R (1995) Surf Coat Technol (submitted)
6. Pospieszczyk A (1993) In: Janev RK, Drawin HW (eds) Atomic and plasma-material interaction processes in controlled thermonuclear fusion, Elsevier, Amsterdam
7. Bolt H, Hemel V, Koch F, Nickel H (1996) Fresenius J Anal Chem 355: this issue