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Surface Engineering

Volumn 14, Issue 5, 1998, Pages 405-412

Diagnostics and modelling of hollow cathode arc plasma used for deposition of metal-carbon films

(4) Buuron, A a Bolt, H a Nizot, P a Koch, F a

a FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; COMPUTATIONAL METHODS; DEPOSITION; DIFFUSION; LANTHANUM COMPOUNDS; MASS SPECTROMETRY; MATHEMATICAL MODELS; METHANE; PLASMA DENSITY;

CONTROL VOLUME METHOD; ENERGY RESOLVED MASS SPECTROMETRY; HOLLOW CATHODE ARC PLASMAS; LANGMUIR PROBE MEASUREMENTS;

PLASMAS;

EID: 0032293743 PISSN: 02670844 EISSN: None Source Type: Journal
DOI: 10.1179/sur.1998.14.5.405 Document Type: Article

Times cited : (2)

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