Diagnostic measurements on a dense hollow cathode arc deposition plasma

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1572-1577

  Buuron, A ^a   Bercovici, J ^a   Hemel, V ^a   Koch, F ^a   Yan, P ^a   Bolt, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

a C:H deposition; Hollow cathode arc plasma; Ion energy spectra; Ion mass spectra; Langmuir probe measurements

Indexed keywords

EID: 0039447576     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00301-0     Document Type: Article

References (15)

1. V. Hemel, H. Bolt, H. Nickel, Report Jül-3242, Forschungszentrum Jülich, 1996.
2. H. Bolt, V. Hemel, H. Nickel, S. Tanaka, Surf. Coat. Technol. 7475 (1995) 188.
3. H. Bolt, V. Hemel, F. Koch, H. Nickel, C. Wiechers, Surf. Coat. Technol. 7475 (1995) 36.
4. H. Bolt, V. Hemel, F. Koch, H. Nickel, C. Wiechers, R. Avni, Surf. Coat. Technol. 88 (1996) 50.
5. V. Hemel, H. Bolt, F. Koch, H. Nickel, Fresenius J. Analyt. Chem. 355 (1996) 244.
6. Balzers PPM 421 Manual, Balzers, Lichtenstein, 1994.
7. A.J.M. Buuron, R.M.F. Driessens, W.J. van Ooij, D.C. Schram, J. Appl. Phys. 78 (1) (1995) 528.
8. J.-L. Delcroix, Plasma Physics, Wiley, London, 1965.
9. P.C. Stangeby, in: D.E. Post, R. Behrisch (Eds.), Physics of Plasma Wall Interactions in Controlled Fusion, Plenum Press, London, Vol. 131, 1986.
10. K.-U. Riemann, Phys. Fluids 24 (12) (1981) 2163.
11. K.-U. Riemann, U. Ehlemann, K. Wiesemann, J. Phys. D: Appl. Phys. 25 (1992) 620.
12. C.W. Jurgensen, J. Appl. Phys. 64 (2) (1988) 590.
13. T. Rose, Report Jül-2662, Forschungszentrum Jülich, 1992.
14. R.J. Carman, A. Maitland, J. Phys. D: Appl. Phys. 20 (1987) 1021.
15. A. Buuron et al., to be published.