Experiments and modelling of combined PVD and CVD processes using a hollow cathode arc discharge plasma

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 520-525

  Bolt, H ^a   Buuron, A ^a   Koch, F ^a   Noethe, M ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

a C:H; Arc discharge; Graded coating; Hollow cathode; Modelling

Indexed keywords

ADHESION; CATHODES; EVAPORATION; HYDROCARBONS; LANTHANUM COMPOUNDS; MATHEMATICAL MODELS; SUBSTRATES;

GRADED COATING; HOLLOW CATHODE ARC DISCHARGE PLASMA;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032182681     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00638-0     Document Type: Article

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