Progress in CMOS integrated measurement systems

IEEE Aerospace and Electronic Systems Magazine

Volumn 14, Issue 10, 1999, Pages 29-34

  Baltes, Henry ^a   Brand, Oliver ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; DEPOSITION; MAGNETIC FIELDS; MICROMACHINING; MICROPROCESSOR CHIPS; VOLATILE ORGANIC COMPOUNDS;

MICROSYSTEMS; NANOSYSTEMS;

CMOS INTEGRATED CIRCUITS;

EID: 0033356624     PISSN: 08858985     EISSN: None     Source Type: Journal    
DOI: 10.1109/62.799626     Document Type: Article

References (14)

1. H. Baltes, O. Paul and O. Brand, 1998, Micromachined thermally-based CMOS microtransducers, Proc. IEEE, vol. 86, pp. 1660-1678.
2. H. Baltes, O. Brand and O. Paul, 1998, CMOS MEMS technology and CAD: the case of thermal microtransducers, Proc. SPIE, vol. 3328, pp. 2-12.
3. C. Maier, S. Kawahito, M. Schneider, M. Zimmermann and H. Baltes, 1999, (21) magnetic micro fluxgate system with digital signal output; Proc. ISSCC '99, to be published.
4. M. Schneider, 1998, CMOS Magnetotransistor and Fluxgate Vector Sensors, Ph.D. thesis, ETH Zurich No. 12746, Switzerland.
5. M. Schneider, S. Kawahito and H. Baltes, 1998, Planar CMOS microfluxgate, NanoSpace 98, Digest of Technical Papers, to be published.
6. A. Koll, A. Schaufelbohl, N. Schneeberger, U. Münch, O. Brand, H. Baltes, C. Menolfi and Q. Huang, 1999, Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier, IEEE Int. Conf. on MEMS (MEMS '99), Technical Digest, IEEE, pp. 547-551.
7. A. Koll, S. Kawahito, F. Mayer, C. Hagleitner, D. Scheiwiller, O. Brand and H. Baltes, 1998, A flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds, Proc. SPIE, vol. 3328, pp. 223-232.
8. D. Lange, A. Koll, O. Brand and H. Baltes, 1998, CMOS chemical microsensors based on resonant cantilever beams: Proc. SPIE, vol. 3328, pp. 233-243.
9. H. Baltes, D. Lange and A. Koll, 1998, The electronic nose in Lilliput, IEEE Spectrum, vol. 35, no. 9, pp. 35-38.
10. A. Koll, A. Kummer, O. Brand and H. Baltes, 1999, Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness adjusted polymer coating, Proc. SPIE, vol. 3673, to be published.
11. D. Lange, T. Akiyama, C. Hagleitner, A. Tonin, H.R. Hidher, P. Niedermann, U. Staufer, N.F. de Rooij, O. Brand and H. Baltes, 1999, Parallel scanning AFM with on-chip circuitry in CMOS technology, IEEE Int. Conf on MEMS (MEMS '99), Technical Digest, IEEE, pp. 447-452.
12. C. Hagleitner, D. Lange, T. Akiyama, A. Tonin, R. Vogt and H. Baltes, 1999, On-chip circuitry for a CMOS parallel scanning AFM, Proc. SPIE, vol. 3673, to be published.
13. P. Niedermann, W. Hänni, D. Morel, A. Perret, N. Skinner, R-F. Indermühle, N.F. de Rooij and P-A. Buffat, 1998, CVD diamond probes for nanotechnology, Appl. Phys. A, vol. 66, pp. 31-34.
14. T. Akiyama, U. Staufer and N.F. de Rooij, 1999, Wafer-and piecewise Si tip transfer technologies for applications in scanning probe microscopy, J Micromech. Microeng., to be published.