Three-axis capacitive accelerometer with uniform axial sensitivities

Journal of Micromechanics and Microengineering

Volumn 6, Issue 4, 1996, Pages 431-435

  Mineta, T ^a   Kobayashi, S ^a   Watanabe, Y ^a   Kanauchi, S ^a   Nakagawa, I ^a   Suganuma, E ^a   Esashi, M ^a  

^a YAMAGATA RESEARCH INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; GRAVITATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOTION CONTROL; SENSITIVITY ANALYSIS; SENSORS;

AXIAL SENSITIVITY; BULK MICROMACHINING; CAPACITIVE ACCELEROMETERS; CENTER OF GRAVITY; SEISMIC MASS; SILICON BEAMS; SILICON ELECTRODES;

ACCELEROMETERS;

EID: 0030375146     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/4/010     Document Type: Article

References (5)

1. Okada K 1992 Tri-axial piezoresistive accelerometer 11th Sensor Symp. (Tokyo, 1992) pp 245-8 Technical Digest
2. Yamada K, Higuchi K and Tanigawa H 1989 Structure analysis for an accelerometer 8th Sensor Symp. (Tokyo, 1989) pp 45-8 Technical Digest
3. Jono K, Hashimoto M and Esashi M 1994 Electrostatic servo system for multi-axis accelerometers Proc. IEEE MEMS '94 (1994) (New York: IEEE) pp 251-25
4. Yoshida M, Nomura T, Mineta T and Esashi M 1993 Capacitive accelerometers without fracture risk during fabrication processes Transducers '93 (New York: IEEE) pp 814-7 Technical Digest
5. Minami K, Moriuchi T and Esashi M 1995 Cavity pressure control for critical damping of packaged micro mechanical devices Transducers '95 (New York: IEEE) pp 240-3 Technical Digest