Measurement of piezoelectric displacements of Pb(Zr,Ti)O3 thin films using a double-beam interferometer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 9 B, 1999, Pages 5402-5405

  Maiwa, Hiroshi ^a   Christman, James A ^a   Kim, Seung Hyun ^b   Kim, Dong Joo ^b   Maria, Jon Paul ^c   Chen, Barry ^d   Streiffer, Stephen K ^a   Kingon, Angus I ^a  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c ENTEGRIS INC   (United States)

^d ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

AFM; Double beam interferometry; MEMS; Piezoelectric properties; PZT

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC VARIABLES MEASUREMENT; FERROELECTRIC MATERIALS; INTERFEROMETRY; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; THIN FILMS;

DOUBLE-BEAM INTERFEROMETRY; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC COEFFICIENT;

DIELECTRIC FILMS;

EID: 0033341681     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.5402     Document Type: Article

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