Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

Materials Research Society Symposium - Proceedings

Volumn 493, Issue , 1998, Pages 427-432

  Xu, F ^a   Chu, F ^a   Shepard, J F ^a   Trolier McKinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE MEASUREMENT; PIEZOELECTRICITY; PRESSURE EFFECTS; SOL-GELS; THIN FILMS; TITANIUM COMPOUNDS;

PIEZOELECTRIC COEFFICIENTS;

PIEZOELECTRIC MATERIALS;

EID: 0031679766     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)