Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 33-38

  Cho, Sung Jin ^a   Lee, Kwang Ryeol ^a   Eun, Kwang Yong ^a   Han, Jun Hee ^a   Ko, Dae Hong ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELASTIC MODULI; ETCHING; LASER APPLICATIONS; POISSON RATIO; SILICON WAFERS; STRAIN MEASUREMENT; SUBSTRATES;

DIAMOND-LIKE CARBON (DLC) FILMS; SILICON SUBSTRATES;

DIAMOND FILMS;

EID: 0031643227     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)