|
Volumn 43-44, Issue PART 2, 1990, Pages 1024-1034
|
Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 50849145375
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(90)90041-A Document Type: Article |
Times cited : (7)
|
References (6)
|