Nitrogenated diamond produced by introducing ammonia into the gas feed in hot-filament CVD

Thin Solid Films

Volumn 355, Issue , 1999, Pages 157-161

  Baranauskas, Vitor ^a   Durrant, Steven F ^a   Tosin, Marcelo C ^a   Peterlevitz, Alfredo C ^a   Li, Bin Bin ^a   Castro, Sandra G ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; DIAMOND FILMS; MORPHOLOGY; NITRIDES; NITRIDING; NITROGEN; OPTICAL MICROSCOPY; SILICA; SUBSTRATES;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

AMORPHOUS FILMS;

EID: 0033320623     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00501-5     Document Type: Article

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