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Volumn 98, Issue 1-3, 1998, Pages 1013-1019
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Mechanisms of diamond films deposition from MPACVD in methane-hydrogen and nitrogen mixtures
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Author keywords
Actinometry; MPACVD Diamond; Nitrogen
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Indexed keywords
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EID: 0010538242
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00289-2 Document Type: Article |
Times cited : (16)
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References (14)
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