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Volumn 98, Issue 1-3, 1998, Pages 1013-1019

Mechanisms of diamond films deposition from MPACVD in methane-hydrogen and nitrogen mixtures

Author keywords

Actinometry; MPACVD Diamond; Nitrogen

Indexed keywords


EID: 0010538242     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00289-2     Document Type: Article
Times cited : (16)

References (14)
  • 3
    • 0041737127 scopus 로고
    • Applications of diamond films and related materials
    • Elsevier Science Pub.
    • T. Chein, Y. Tzeng, Applications of Diamond Films and Related Materials, Third International Conference, Elsevier Science Pub. 1995, p. 373.
    • (1995) Third International Conference , pp. 373
    • Chein, T.1    Tzeng, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.