Homoepitaxial growth of CVD diamond: effect of nitrogen contaminations on growth rates

Materials Research Society Symposium - Proceedings

Volumn 416, Issue , 1996, Pages 75-80

  Wild, C ^a   Locher, R ^a   Koidl, P ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONTAMINATION; EPITAXIAL GROWTH; INTERFEROMETRY; LASER APPLICATIONS; NITROGEN; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; SUBSTRATES; X RAY ANALYSIS;

GROWTH RATES; HOMOEPITAXY; LASER INTERFEROMETRY; X RAY TEXTURE ANALYSIS;

DIAMOND FILMS;

EID: 0029781162     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)