Nonequilibrium experiments on self-diffusion in silicon at low temperatures using isotopically enriched structures

Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 512-515

  Ural, Ant ^a   Griffin, P B ^a   Plummer, J D ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ENTHALPY; ENTROPY; EPITAXIAL GROWTH; POINT DEFECTS; THERMOOXIDATION;

NITRIDATION;

SEMICONDUCTING SILICON;

EID: 0033313788     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)00541-4     Document Type: Article

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