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Volumn 574, Issue , 1999, Pages 329-334
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Oxygen diffusioin in tantalum oxide metal-oxide-metal capacitor structures
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
ALUMINUM;
DIFFUSION IN SOLIDS;
PLATINUM;
SILICON;
TANTALUM COMPOUNDS;
TITANIUM;
TITANIUM NITRIDE;
TITANIUM OXIDES;
TUNGSTEN COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
METAL-OXIDE-METAL (MOM) CAPACITORS;
TANTALUM OXIDE;
TUNGSTEN NITRIDE;
CAPACITORS;
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EID: 0033279346
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (2)
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References (12)
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