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Volumn 574, Issue , 1999, Pages 329-334

Oxygen diffusioin in tantalum oxide metal-oxide-metal capacitor structures

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; DIFFUSION IN SOLIDS; PLATINUM; SILICON; TANTALUM COMPOUNDS; TITANIUM; TITANIUM NITRIDE; TITANIUM OXIDES; TUNGSTEN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0033279346     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (2)

References (12)
  • 6
    • 33750882660 scopus 로고    scopus 로고
    • private communication.
    • R. L. Cava, private communication.
    • Cava, R.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.