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Volumn 51, Issue 3, 1995, Pages 2436-2444
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Charged-species profiles in electronegative radio-frequency plasmas
a
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0041719056
PISSN: 1063651X
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevE.51.2436 Document Type: Article |
Times cited : (69)
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References (29)
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