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Volumn 51, Issue 3, 1995, Pages 2436-2444

Charged-species profiles in electronegative radio-frequency plasmas

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0041719056     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.51.2436     Document Type: Article
Times cited : (69)

References (29)
  • 8
    • 84927496301 scopus 로고    scopus 로고
    • Contributions to the NATO Advanced Research Workshop on the Formation, Transport and Consequences of Particles in Plasmas [Plasma Sources Sci. Technol. 3 (3) (1994)].
  • 18
    • 84927482173 scopus 로고    scopus 로고
    • Assuming a constant momentum transfer cross section of 5 ×10-16 cmsup 2, compare G. Csanak, D.C. Cartwright, S.K. Srivastava, and S. Trajmar, in Electron Molecule Interactions and Their Applications, edited by L.G. Christophorou (Academic, New York, 1984).
  • 24
    • 84927462325 scopus 로고    scopus 로고
    • J.D.P. Passchier, Ph.D. thesis, Utrecht University, The Netherlands, 1994.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.