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Physical Review E

Volumn 51, Issue 3, 1995, Pages 2436-2444

Charged-species profiles in electronegative radio-frequency plasmas

(5) Vender, D a Stoffels, W W a Stoffels, E a Kroesen, G M W a De Hoog, F J a

a EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041719056 PISSN: 1063651X EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevE.51.2436 Document Type: Article

Times cited : (69)

References (29)

1
- 0001200953
- (1990) J. Appl. Phys. , vol.67 , pp. 130
- Bletzinger, P.¹

2
- 0025475042
- (1990) J. Phys. D , vol.23 , pp. 999
- Amemiya, H.¹

3
- 0024135419
- (1988) J. Phys. D Appl. Phys. , vol.21 , pp. 1733
- Braithwaite, N. St.J.¹ Allen, J.E.²

4
- 0025889496
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 161
- Shindo, H.¹ Horiike, Y.²

5
- 0026840986
- (1993) IEEE Trans. Plasma Sci. , vol.20 , pp. 62
- Boswell, R.W.¹ Lichtenberg, A.J.² Vender, D.³

6
- 84927470285
- edited by, M.L.M. van de Sanden, European Physical Society, Eindhoven, The Netherlands
- (1994) Europhysics Conference Abstracts Volume 18E
- Kaganovich, I.D.¹

7
- 36449008361
- (1994) J. Appl. Phys. , vol.75 , pp. 1340
- Howling, A.A.¹ Sansonnens, L.² Dorier, J.L.³ Hollenstein, Ch.⁴

8
- 84927496301
- Contributions to the NATO Advanced Research Workshop on the Formation, Transport and Consequences of Particles in Plasmas [Plasma Sources Sci. Technol. 3 (3) (1994)].

9
- 0000041999
- preceding paper
- (1995) Phys. Rev. E , vol.51 , pp. 2425
- Stoffels, E.¹ Stoffels, W.W.² Vender, D.³ Kando, M.⁴ Kroesen, G.M.W.⁵ de Hoog, F.J.⁶

10
- 0001531026
- (1989) J. Chem. Phys. , vol.91 , pp. 7947
- Sharpless, R.L.¹ Slanger, T.G.²

11
- 0027680530
- (1993) J. Phys. D , vol.26 , pp. 1638
- Franklin, R.N.¹ Daniels, P.G.² Snell, J.³

12
- 0026839783
- (1992) J. Phys. D , vol.25 , pp. 453
- Franklin, R.N.¹ Snell, J.²

13
- 0001398338
- (1994) J. Appl. Phys. , vol.75 , pp. 2339
- Lichtenberg, A.J.¹ Vahedi, V.² Lieberman, M.A.³ Rognlien, T.⁴

14
- 0000277577
- (1959) Proc. Phys. Soc. London , vol.73 , pp. 818
- Thompson, J.B.¹

15
- 0022109788
- (1985) J. Phys. D Appl. Phys. , vol.18 , pp. 1533
- Rogoff, G.L.¹

16
- 84927508364
- J. Vac. Sci. Technol. A (to be published).
- Vender, D.¹ Stoffels, E.² Stoffels, W.W.³ Kroesen, G.M.W.⁴ de Hoog, F.J.⁵

17
- 84927475824
- Lichtenberg, A.J.¹ Vahedi, V.² Lieberman, M.A.³

18
- 84927482173
- Assuming a constant momentum transfer cross section of 5 ×10-16 cmsup 2, compare G. Csanak, D.C. Cartwright, S.K. Srivastava, and S. Trajmar, in Electron Molecule Interactions and Their Applications, edited by L.G. Christophorou (Academic, New York, 1984).

19
- 0017075785
- (1976) At. Data Nucl. Data Tables , vol.17 , pp. 177
- Ellis, H.W.¹ Pai, R.Y.² McDaniel, E.W.³ Mason, E.A.⁴ Viehland, L.A.⁵

20
- 0001510759
- (1965) J. Chem. Phys. , vol.43 , pp. 1480
- Rapp, D.¹ Briglia, D.D.²

21
- 0025755151
- (1991) Vacuum , vol.42 , pp. 1009
- Al Assadi, K.F.¹ Brown, N.M.D.² Chatterton, P.A.³ Rees, J.A.⁴

22
- 0040946462
- (1975) J. Chem. Phys. , vol.63 , pp. 3731
- Märk, T.D.¹

23
- 84927490313
- J. Vac. Sci. Technol. A (to be published).
- Stoffels, E.¹ Stoffels, W.W.² Vender, D.³ Kroesen, G.M.W.⁴ de Hoog, F.J.⁵

24
- 84927462325
- J.D.P. Passchier, Ph.D. thesis, Utrecht University, The Netherlands, 1994.

25
- 0002948860
- (1989) Zh. Tekh. Fiz. , vol.59 , pp. 21
- Tsendin, L.D.¹

26
- 0002018673
- (1989) Sov. Phys. Tech. Phys. , vol.34 , pp. 11

27
- 84927474222
- (Ref. [6]).
- European Conference Abstracts Vol. 18E
- Franklin, R.N.¹

28
- 0026140546
- (1991) IEEE Trans. Plasma Sci. , vol.19 , pp. 65
- Birdsall, C.K.¹

29
- 36449001192
- (1992) J. Appl. Phys. , vol.72 , pp. 3971
- Gogolides, E.¹ Sawin, H.H.²

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