An analytical model for interaction of sipos layer with underlying silicon of soi resurf devices

IEEE Transactions on Electron Devices

Volumn 46, Issue 8, 1999, Pages 1804-1807

  Chung, Sang Koo ^a   Shin, Dong Koo ^a  

^a Ajou University   (South Korea)

Author keywords

Breakdown voltage; Coupling of potentials; Modeling; Sipos field plate; Soi resurf diode

Indexed keywords

COMPUTER SIMULATION; ELECTRIC BREAKDOWN; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DIODES; SILICON ON INSULATOR TECHNOLOGY;

RESURF DIODE; SEMI INSULATING POLYCRYSTALLINE SILICON LAYER;

SEMICONDUCTOR DEVICE MODELS;

EID: 0033169522     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.777174     Document Type: Article

References (8)

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