EFFECTS OF SIPOS PASSIVATION ON DC AND SWITCHING PERFORMANCE OF HIGH VOLTAGE MOS TRANSISTORS.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1986, Pages 646-649

  Mukherjee, S ^a   Chou, C J ^a   Shaw, K ^a   McArthur, D ^a   Rumennik, V ^a  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON - APPLICATIONS; TRANSISTORS, FIELD EFFECT - STABILITY;

PASSIVATION LAYER; SEMIINSULATING POLYSILICON;

SEMICONDUCTOR DEVICES, MOSFET;

EID: 0022958454     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1986.191274     Document Type: Conference Paper

References (4)