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Applied Physics A: Materials Science and Processing

Volumn 68, Issue 4, 1999, Pages 411-416

On the sensitivity limit of positron annihilation: detection of vacancies in as-grown silicon

(6) Gebauer, J a Rudolf, F a Polity, A a Krause Rehberg, R a Martin, J b Becker, P b

a MARTIN LUTHER UNIVERSITY HALLE WITTENBERG (Germany)

b PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; DENSITY (SPECIFIC GRAVITY); ELECTRON IRRADIATION; LOW TEMPERATURE OPERATIONS; NITROGEN; POSITRONS;

FLOAT ZONE SILICON; POSITRON ANNIHILATION; VACANCY DEFECTS;

SILICON;

EID: 0033116775 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390050915 Document Type: Article

Times cited : (30)

References (35)

1
- 33746343244
- P.M. Fahey, P.B. Griffin, J.D. Plummer: Rev. Mod. Phys. 61, 289 (1989)
- (1989) Rev. Mod. Phys. , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

2
- 0001527312
- M. Jacob, P. Pichler, H. Ryssel, R. Falster: J. Appl. Phys. 82, 182 (1997)
- (1997) J. Appl. Phys. , vol.82 , pp. 182
- Jacob, M.¹ Pichler, P.² Ryssel, H.³ Falster, R.⁴

3
- 0022061598
- T.Y. Tan, U. Gösele: Appl. Phys. A 37, 1 (1985)
- (1985) Appl. Phys. A , vol.37 , pp. 1
- Tan, T.Y.¹ Gösele, U.²

4
- 0004004240
- IOS Press, Amsterdam
- A. Dupasquier, J.A.P. Mills (Eds.): Positron Spectroscopy of Solids (IOS Press, Amsterdam 1995)
- (1995) Positron Spectroscopy of Solids
- Dupasquier, A.¹ Mills, J.A.P.²

5
- 0029223087
- P. Hautojärvi: Mater. Sci. Forum 175-178, 47 (1995)
- (1995) Mater. Sci. Forum , vol.175-178 , pp. 47
- Hautojärvi, P.¹

6
- 0031143390
- R. Krause-Rehberg, H.S. Leipner: Appl. Phys. A 64, 457 (1997)
- (1997) Appl. Phys. A , vol.64 , pp. 457
- Krause-Rehberg, R.¹ Leipner, H.S.²

7
- 21544447969
- S. Dannefaer, T. Bretagnon: J. Appl. Phys. 77, 5584 (1995)
- (1995) J. Appl. Phys. , vol.77 , pp. 5584
- Dannefaer, S.¹ Bretagnon, T.²

8
- 0345684214
- S.C. Sharma, R.C. Hyer, N. Hozhabri, M.F. Pas. S, Kim: Appl. Phys. Lett. 61, 1939 (1992)
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1939
- Sharma, S.C.¹ Hyer, R.C.² Hozhabri, N.³ Pas S, M.F.⁴

9
- 0000412810
- J. Mäkinen, C. Corbel, P. Hautojärvi, P. Moser, F. Pierre: Phys. Rev. B 39, 10162 (1989)
- (1989) Phys. Rev. B , vol.39 , pp. 10162
- Mäkinen, J.¹ Corbel, C.² Hautojärvi, P.³ Moser, P.⁴ Pierre, F.⁵

10
- 0001766004
- P. Seyfried, P. Becker, A. Kozdon, F. Ludicke, F. Spieweck, J. Stumpel, H. Wagenbreth, D. Windisch, P. de Bievre, H.H. Ku, G. Lanaers, T.J. Murphy, H.S. Peiser, S. Valkiers: Z. Phys. B - Condens. Matter 87, 289 (1992)
- (1992) Z. Phys. B - Condens. Matter , vol.87 , pp. 289
- Seyfried, P.¹ Becker, P.² Kozdon, A.³ Ludicke, F.⁴ Spieweck, F.⁵ Stumpel, J.⁶ Wagenbreth, H.⁷ Windisch, D.⁸ De Bievre, P.⁹ Ku, H.H.¹⁰ Lanaers, G.¹¹ Murphy, T.J.¹² Peiser, H.S.¹³ Valkiers, S.¹⁴

11
- 0006420277
- ed. by W.M. Bullis Electrochem. Soc., Pennington
- T. Abe, T. Masui, H. Harada, J. Chikawa: In VLSI Science and Technology, ed. by W.M. Bullis (Electrochem. Soc., Pennington 1985) p. 543
- (1985) VLSI Science and Technology , pp. 543
- Abe, T.¹ Masui, T.² Harada, H.³ Chikawa, J.⁴

12
- 0030260011
- T.E.M. Staab, B. Somieski, R. Krause-Rehberg: Nucl. Instrum. Methods Phys. Res. A 381, 141 (1996)
- (1996) Nucl. Instrum. Methods Phys. Res. A , vol.381 , pp. 141
- Staab, T.E.M.¹ Somieski, B.² Krause-Rehberg, R.³

13
- 84990699590
- S. Dannefaer: Phys. Status Solidi A 102, 481 (1987)
- (1987) Phys. Status Solidi A , vol.102 , pp. 481
- Dannefaer, S.¹

14
- 0000394550
- M.J. Puska, C. Corbel, R.M. Nieminen: Phys. Rev. B 41, 9980 (1990)
- (1990) Phys. Rev. B , vol.41 , pp. 9980
- Puska, M.J.¹ Corbel, C.² Nieminen, R.M.³

15
- 0000593978
- W. Brandt, R. Paulin: Phys. Rev. B 5, 2430 (1972)
- (1972) Phys. Rev. B , vol.5 , pp. 2430
- Brandt, W.¹ Paulin, R.²

16
- 0019684198
- S. Dannefaer: Appl. Phys. A 26, 255 (1981)
- (1981) Appl. Phys. A , vol.26 , pp. 255
- Dannefaer, S.¹

17
- 0030261788
- B. Somieski, T.E.M. Staab, R. Krause-Rehberg: Nucl. Instrum. Methods Phys. Res. A 381, 128 (1996)
- (1996) Nucl. Instrum. Methods Phys. Res. A , vol.381 , pp. 128
- Somieski, B.¹ Staab, T.E.M.² Krause-Rehberg, R.³

18
- 0024770517
- M. Hasebe, Y. Takeoka, S. Shinomiya, S. Naito: Jpn. J. Appl. Phys. 26, L1999 (1989)
- (1989) Jpn. J. Appl. Phys. , vol.26
- Hasebe, M.¹ Takeoka, Y.² Shinomiya, S.³ Naito, S.⁴

19
- 0027662307
- S. Sadamitsu, S. Umeno, Y. Koike, M. Hourai, S. Sumita, T. Shigematsu: Jpn. J. Appl. Phys. 32, 3675 (1993)
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 3675
- Sadamitsu, S.¹ Umeno, S.² Koike, Y.³ Hourai, M.⁴ Sumita, S.⁵ Shigematsu, T.⁶

20
- 0001106788
- M.J. Puska, C. Corbel: Phys. Rev. B 38, 9874 (1988)
- (1988) Phys. Rev. B , vol.38 , pp. 9874
- Puska, M.J.¹ Corbel, C.²

21
- 0000596921
- M. Saito, A. Oshiyama: Phys. Rev. B 53, 7810 (1996)
- (1996) Phys. Rev. B , vol.53 , pp. 7810
- Saito, M.¹ Oshiyama, A.²

22
- 0001176545
- P. Mascher, S. Dannefaer, D. Kerr: Phys. Rev. B 40, 11 764 (1989)
- (1989) Phys. Rev. B , vol.40 , pp. 11764
- Mascher, P.¹ Dannefaer, S.² Kerr, D.³

23
- 0001599099
- ed. by S.T. Pantelides Gordon and Breach, New York
- G.D. Watkins: In Deep Centers in Semiconductors, ed. by S.T. Pantelides (Gordon and Breach, New York 1986) p. 147
- (1986) Deep Centers in Semiconductors , pp. 147
- Watkins, G.D.¹

24
- 0001115176
- S. Dannefaer, D. Kerr: J. Appl. Phys. 60, 1313 (1986)
- (1986) J. Appl. Phys. , vol.60 , pp. 1313
- Dannefaer, S.¹ Kerr, D.²

25
- 36049055660
- L.J. Cheng, J.C. Corelli, J.W. Corbett, G.D. Watkins: Phys. Rev. 152, 761 (1966)
- (1966) Phys. Rev. , vol.152 , pp. 761
- Cheng, L.J.¹ Corelli, J.C.² Corbett, J.W.³ Watkins, G.D.⁴

26
- 0017631109
- L.C. Kimerling: Inst. Phys. Conf. Ser. 31, 221 (1977)
- (1977) Inst. Phys. Conf. Ser. , vol.31 , pp. 221
- Kimerling, L.C.¹

27
- 0000437604
- Y.-H. Lee, J.W. Corbett: Phys. Rev. B 13, 2653 (1976)
- (1976) Phys. Rev. B , vol.13 , pp. 2653
- Lee, Y.-H.¹ Corbett, J.W.²

28
- 0000928030
- S.K. Estreicher, J.L. Hastings, P.A. Fedders: Appl. Phys. Lett. 70, 432 (1997)
- (1997) Appl. Phys. Lett. , vol.70 , pp. 432
- Estreicher, S.K.¹ Hastings, J.L.² Fedders, P.A.³

29
- 0001640934
- J. Mäkinen, P. Hautojärvi, C. Corbel: J. Phys.: Condens. Matter 4, 5137 (1992)
- (1992) J. Phys.: Condens. Matter , vol.4 , pp. 5137
- Mäkinen, J.¹ Hautojärvi, P.² Corbel, C.³

30
- 0004383148
- J. Mäkinen, C. Corbel, P. Hautojärvi, D. Mathiot: Phys. Rev. B 43, 12114 (1991)
- (1991) Phys. Rev. B , vol.43 , pp. 12114
- Mäkinen, J.¹ Corbel, C.² Hautojärvi, P.³ Mathiot, D.⁴

31
- 21544478919
- P. Asoka-Kumar, K.G. Lynn, D.O. Welch: J. Appl. Phys. 76, 4935 (1994)
- (1994) J. Appl. Phys. , vol.76 , pp. 4935
- Asoka-Kumar, P.¹ Lynn, K.G.² Welch, D.O.³

32
- 0001508587
- S. Eichler, J. Gebauer, F. Börner, A. Polity, R. Krause-Rehberg, E. Wendler, B. Weber, W. Wesch, H. Börner: Phys. Rev. B 56, 1393 (1997)
- (1997) Phys. Rev. B , vol.56 , pp. 1393
- Eichler, S.¹ Gebauer, J.² Börner, F.³ Polity, A.⁴ Krause-Rehberg, R.⁵ Wendler, E.⁶ Weber, B.⁷ Wesch, W.⁸ Börner, H.⁹

33
- 0000592917
- A. Polity, F. Börner, S. Huth, S. Eichler, R. Krause-Rehberg: Phys. Rev. B 58, 10363 (1998)
- (1998) Phys. Rev. B , vol.58 , pp. 10363
- Polity, A.¹ Börner, F.² Huth, S.³ Eichler, S.⁴ Krause-Rehberg, R.⁵

34
- 0000608072
- ed. by W. Schroeter VCH, Weinheim
- G.D. Watkins: In Electronic Structure and Properties of Semiconductors, ed. by W. Schroeter (VCH, Weinheim 1992) p. 105
- (1992) Electronic Structure and Properties of Semiconductors , pp. 105
- Watkins, G.D.¹

35
- 0041176250
- H. Zillgen, P. Ehrhart: Nucl. Instrum. Methods Phys. Res., Sect. B 127-128, 27 (1997)
- (1997) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.127-128 , pp. 27
- Zillgen, H.¹ Ehrhart, P.²

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