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Volumn 18, Issue 2-3, 1999, Pages 344-350

Massively Parallel Nanorobotics for Lithography and Data Storage

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DISKS; DATA STORAGE EQUIPMENT; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; PARALLEL PROCESSING SYSTEMS;

EID: 0033096889     PISSN: 02783649     EISSN: None     Source Type: Journal    
DOI: 10.1177/02783649922066259     Document Type: Article
Times cited : (11)

References (10)
  • 1
    • 0001195136 scopus 로고    scopus 로고
    • Robotic nanomanipulation with a scanning probe microscope in a networked computing environment
    • Baur, C., Gazen, B. C., Koel, B. E., Ramachandran, T. R., Requicha, A. A. G., and Zini, L. 1997. Robotic nanomanipulation with a scanning probe microscope in a networked computing environment. J. Vacuum Sci. Tech. B 15(4):1577-1580.
    • (1997) J. Vacuum Sci. Tech. B , vol.15 , Issue.4 , pp. 1577-1580
    • Baur, C.1    Gazen, B.C.2    Koel, B.E.3    Ramachandran, T.R.4    Requicha, A.A.G.5    Zini, L.6
  • 2
    • 0030570065 scopus 로고    scopus 로고
    • Imprint lithography with 25-nanometer resolution
    • Chou, S. Y., Krauss, P. R., and Renstrom, P. J. 1996. Imprint lithography with 25-nanometer resolution. Science 272:85-87.
    • (1996) Science , vol.272 , pp. 85-87
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 3
    • 0000101357 scopus 로고    scopus 로고
    • Microelectromechanical scanning-probe instruments for array architectures
    • Miller, S. A., Turner, K. L., and Macdonald, N. C. 1997. Microelectromechanical scanning-probe instruments for array architectures. Rev. Scientific Instruments 68(11):4155-4162.
    • (1997) Rev. Scientific Instruments , vol.68 , Issue.11 , pp. 4155-4162
    • Miller, S.A.1    Turner, K.L.2    Macdonald, N.C.3
  • 4
    • 0039815370 scopus 로고    scopus 로고
    • Independent parallel lithography using the atomic force microscope
    • Minne, S. C., Manalis, S. R., Atalar, A., and Quate, C. F. 1996. Independent parallel lithography using the atomic force microscope. J. Vacuum Sci. Tech. B 14(4):2456-2461.
    • (1996) J. Vacuum Sci. Tech. B , vol.14 , Issue.4 , pp. 2456-2461
    • Minne, S.C.1    Manalis, S.R.2    Atalar, A.3    Quate, C.F.4
  • 6
    • 0031344594 scopus 로고    scopus 로고
    • 6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
    • Ried, R. P., Mamin, H. J., Terris, B. D., Fan, L.-S., and Rugar, D. 1997. 6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips. J. Microelectromechanical Sys. 6(4):294-302.
    • (1997) J. Microelectromechanical Sys. , vol.6 , Issue.4 , pp. 294-302
    • Ried, R.P.1    Mamin, H.J.2    Terris, B.D.3    Fan, L.-S.4    Rugar, D.5
  • 7
    • 0009347638 scopus 로고    scopus 로고
    • Direct patterning of Si(001) surfaces by atomic manipulation
    • Sailing, C. T. 1996. Direct patterning of Si(001) surfaces by atomic manipulation. J. Vacuum Sci. Tech. B 14(2):1322-1326.
    • (1996) J. Vacuum Sci. Tech. B , vol.14 , Issue.2 , pp. 1322-1326
    • Sailing, C.T.1
  • 8
    • 0347921406 scopus 로고    scopus 로고
    • Silicon wafer-scale microfabrication factory using scanning-probe microrobots
    • (Palo Alto, CA, November 5-8). Palo Alto, CA: Foresight Institute
    • Tabib-Azar, M., and Litt, M. 1997 (Palo Alto, CA, November 5-8). Silicon wafer-scale microfabrication factory using scanning-probe microrobots. Fifth Foresight Conf. on Molecular Nanotechnology. Palo Alto, CA: Foresight Institute.
    • (1997) Fifth Foresight Conf. on Molecular Nanotechnology
    • Tabib-Azar, M.1    Litt, M.2
  • 10
    • 0001570990 scopus 로고    scopus 로고
    • Extending microcontact printing as a microlithographic technique
    • Xia, Y., and Whitesides, G. M. 1997. Extending microcontact printing as a microlithographic technique. Langmuir 13:2059-2067.
    • (1997) Langmuir , vol.13 , pp. 2059-2067
    • Xia, Y.1    Whitesides, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.