Direct patterning of Si(001) surfaces by atomic manipulation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1322-1326

  Salling, Craig T ^a,b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009347638     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589089     Document Type: Article

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