Statistical performance evaluation of electrostatic micro actuators for a deformable mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2881, Issue , 1996, Pages 35-44

  Krishnamoorthy, Raji ^a   Bifano, Thomas G ^a   Sandri, Guido V ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIXED-FIXED ACTUATORS; MICROACTUATORS;

ADAPTIVE OPTICS; CHARACTERIZATION; ELECTROSTATICS; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; PERFORMANCE; RELIABILITY; TESTING;

ACTUATORS;

EID: 0030396291     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)