Design and testing of polysilicon surface-micromachined piston micromirror arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3292, Issue , 1998, Pages 60-70

  Cowan, William D ^a   Bright, Victor M ^a   Lee, Max K ^a   Comtois, John H ^a   Michalicek, M Adrian ^a  

^a Air Force Institute of Technology   (United States)

Author keywords

Micro electro mechanical systems (MEMS); Micro opto electro mechanical systems; Micromirrors

Indexed keywords

CHEMICAL MECHANICAL POLISHING; METALLIZING; MICROMACHINING; MIRRORS; POLYSILICON; SURFACES;

MICROELECTROMECHANICAL SYSTEMS; MICROMIRRORS; MICROOPTOELECTOMECHANICAL SYSTEMS; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032224947     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.305508     Document Type: Conference Paper

References (10)

1. Projection display systems based on the Digital Micromirror Device™ (DMD™)
2. Use of micro-electromechanical deformable mirrors to control aberrations in optical systems: Theoretical and experimental results
3. Modeling of stress-induced curvature in surface-micromachined devices
4. Continuous-membrane surface-micromachined silicon deformable mirror
5. SAMPLE (sandia agile MEMS prototyping, layout tools, and education)
6. Advanced modeling of micromirror devices
7. Investigation of maximum optical power rating for micro-electro-mechanical device