Measuring frequency response of surface-micromachined resonators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3225, Issue , 1997, Pages 32-43

  Cowan, William D ^a   Bright, Victor M ^a   Dalton, George C ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Micro electro mechanical systems (mems); Polysilicon; Resonators

Indexed keywords

FREQUENCY RESPONSE; INTERFEROMETERS; LASER INTERFEROMETRY; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; POLYSILICON; RESONATORS; WELL TESTING;

LASER INTERFEROMETER; MEASURING FREQUENCY; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINED RESONATORS; PRESSURE AND TEMPERATURE; RESIDUAL MATERIALS; RESONATOR STRUCTURES; VALIDATION TESTING;

SURFACE MICROMACHINING;

EID: 57649160071     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.284552     Document Type: Conference Paper

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