Micro-opto-electro-mechanical, (MOEM), adaptive optic system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 12-24

  Clark, Rodney L ^a   Karpinsky, John R ^a   Hammer, Jay A ^a   Anderson, Roland ^a   Lindsey, Randall ^a   Brown, Dan ^a   Merritt, Paul ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

Adaptive Optics; MEMS; Microlens arrays; MOEM

Indexed keywords

IMAGE RECONSTRUCTION; INTEGRATED OPTOELECTRONICS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; MIRRORS; OPTICAL SENSORS; OPTICAL SYSTEMS; REFRACTIVE INDEX; VLSI CIRCUITS; WAVEFRONTS;

DEFORMABLE MIRRORS; MICROOPTOELECTROMECHANICAL (MOEM) SYSTEMS;

ADAPTIVE OPTICS;

EID: 0031370216     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271413     Document Type: Conference Paper

References (3)

1. Micro-opto-electro machine devices for spatial light modulation
2. Micro-opto-electro-mechanical, (MOEM), adaptive optic system
3. Controls issues with a MEMS adaptive optics system