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Volumn 471, Issue , 1997, Pages 125-136
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Critical technologies for poly-Si TFT in high resolution AM-LCD
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
CRYSTALLIZATION;
DEPOSITION;
HYDROGENATION;
LEAKAGE CURRENTS;
LIQUID CRYSTAL DISPLAYS;
LITHOGRAPHY;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTOR DOPING;
SILICON;
ACTIVE MATRIX LIQUID CRYSTAL DISPLAY (AMLCD);
LIGHTLY DOPED DRAIN THIN FILM TRANSISTOR (TFT) STRUCTURES;
THIN FILM TRANSISTORS;
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EID: 0030689175
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-471-125 Document Type: Conference Paper |
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Times cited : (6)
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References (27)
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