Hot-wire hydrogen passivation of polycrystalline silicon TFT's

Materials Research Society Symposium - Proceedings

Volumn 471, Issue , 1997, Pages 143-148

  Beldi, N ^a   Le Bihan, F ^a   Kis Sion, K ^a   Sarret, M ^a   Mohammed Brahim, T ^a   Raoult, F ^a   Rogel, R ^a   Guillet, J ^a   Bouree, J E ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHARGE CARRIERS; CURRENT VOLTAGE CHARACTERISTICS; DIFFUSION IN SOLIDS; DISPLAY DEVICES; ELECTRIC RESISTANCE; GRAIN BOUNDARIES; HYDROGEN; HYDROGENATION; PASSIVATION; POLYCRYSTALLINE MATERIALS; SILICON;

HOT WIRE HYDROGEN PASSIVATION;

THIN FILM TRANSISTORS;

EID: 0030646948     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-471-143     Document Type: Conference Paper

References (7)