Enhancement of on/off current ratio of poly-silicon TFT by selective laser-induced crystallization of active layer

Materials Research Society Symposium - Proceedings

Volumn 471, Issue , 1997, Pages 191-196

  Jeon, Jae Hong ^a   Park, Cheol Min ^a   Choi, Hong Seok ^a   Kim, Cheon Hong ^a   Han, Min Koo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; DISPLAY DEVICES; EXCIMER LASERS; LASER APPLICATIONS; LEAKAGE CURRENTS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

INDIUM TIN OXIDE FILMS; ON/OFF CURRENT RATIO;

THIN FILM TRANSISTORS;

EID: 0030683270     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-471-191     Document Type: Conference Paper

References (6)