Micromachined structures for vertical microelectrooptical devices on InP

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1996, Pages 275-278

  Seassal, C ^a   Leclercq, J L ^a   Letartre, X ^a   Gagnaire, A ^a   Gendry, M ^a   Viktorovitch, P ^a   Laine, J P ^a   Sidoroff, F ^a   Ledantec, R ^a   Benyattou, T ^a   Guillot, G ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; MICROMACHINING; PHOTOLUMINESCENCE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES;

MICROELECTROOPTICAL DEVICES; MICROREFLECTIVITY MEASUREMENTS;

ELECTROOPTICAL DEVICES;

EID: 0029724043     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)