Optical characterization methods of InP based micro-opto-electro-mechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 258-264

  Le Dantec, R ^a   Benyattou, T ^a   Guillot, G ^a   Seassal, C ^a   Leclercq, J L ^a   Letartre, X ^a   Gagnaire, A ^a   Gendry, M ^a   Viktorovitch, P ^a   Benferhat, R ^a   Rondi, D ^a   Blondeau, R ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

Fabry Perot Cavity; InP; M.O.E.M.S.; Micromachined; W.D.M

Indexed keywords

CAVITY RESONATORS; ELECTROSTATICS; FABRY-PEROT INTERFEROMETERS; LIGHT REFLECTION; MICROOPTICS; OPTICAL COMMUNICATION; OPTICAL FILTERS; REACTIVE ION ETCHING; SEMICONDUCTING INDIUM PHOSPHIDE;

MICRO-OPTO-ELECTRO-MECHANICAL (MOEM) SYSTEMS;

OPTOELECTRONIC DEVICES;

EID: 0031370866     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271421     Document Type: Conference Paper

References (6)

1. Vertical coupled-cavity microinterferometer on GaAs with deformable-menbrane top mirror
2. Wide and continuous wavelength tuning in a vertical-cavity surface-emitting laser using a micromachined deformable-membrane mirror
3. Tunable micromachined vertical surface emitting laser
4. Surface micromachined fabry perot tunable filter
5. Fabrication of InP based freestanding microstructures by selective surface micromachining