Growth- and process-induced defects in SiGe-based heterostructures

Diffusion and Defect Data Pt.B: Solid State Phenomena

Volumn 69, Issue , 1999, Pages 43-52

  Larsen, A N ^a  

^a AARHUS UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON ALLOYS;

MISFIT STRAIN;

HETEROJUNCTIONS;

EID: 0032664193     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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