SiCl4 desorption in chlorine etching of Si (100) - A first principles study

Surface Science

Volumn 432, Issue 1-2, 1999, Pages 125-138

  Chan, S P ^a   Liu, Z F ^a   Lau, W M ^a   Tse, J S ^b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Ab initio quantum chemical methods and calculations; Chemisorption; Computer simulations; Density functional calculations; Models of surface chemical reactions; Physical adsorption; Silicon tetrachloride; Solid gas interfaces

Indexed keywords

ADSORPTION; CHEMICAL BONDS; CHEMISORPTION; CHLORINE; DESORPTION; ION BOMBARDMENT; QUANTUM THEORY; RADIATION EFFECTS; REACTION KINETICS; SILICON; SILICON COMPOUNDS; SURFACE CHEMISTRY;

DENSITY FUNCTIONAL THEORY; FIRST PRINCIPLES CALCULATIONS; QUANTUM CHEMISTRY; SILICON TETRACHLORIDE;

ETCHING;

EID: 0032641946     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00610-X     Document Type: Article

References (42)

1. B.A. Heath, T.M. Mayer, in: N.G. Einspruch, D.M. Brown (Eds.), Plasma Processing for VLSI, VLSI Electronics - Microstructure Science vol. 8 , Academic Press, New York, 1984, pp. 365-409.
2. H.F. Winters, J.W. Coburn, Surf. Sci. Rep. 14 (1992) 161.
3. W.M. Lau, I. Bello, L.J. Huang, X. Feng, M. Vos, I.V. Mitchell, J. Appl. Phys. 74 (1993) 7101.
4. L.J. Huang, W.M. Lau, H.T. Tang, I.V. Mitchell, W.N. Lennard, P.J. Schultz, M. Kasrai, Phys. Rev. B 50 (1994) 18453.
5. L.J. Huang, W.M. Lau, H.T. Tang, I.V. Mitchell, W.N. Lennard, Nucl. Instrum. Methods B 106 (1995) 34.
6. K. Suzuki, S. Hiraoka, S. Nishimatsu, J. Appl. Phys. 64 (1988) 3697.
7. F.X. Campos, G.C. Weaver, C.J. Waltman, S.R. Leone, J. Vac. Sci. Technol. B 10 (1992) 2217.
8. D.J.D. Sullivan, H.C. Flaum, A.C. Kummel, J. Phys. Chem. 97 (1993) 12051.
9. A. Szabo, P.D. Farrall, T. Engel, J. Appl. Phys. 75 (1994) 3623.
10. A. Szabo, P.D. Farrall, T. Engel, Surf. Sci. 312 (1994) 284.
11. A. Szabo, P.D. Farrall, T. Engel, J. Vac. Sci. Technol. A 12 (1994) 948.
12. Y. Teraoka, I. Nishiyama, Appl. Phys. Lett. 63 (1993) 3355.
13. Y. Teraoka, I. Nishiyama, Jpn. J. Appl. Phys. 33 (1994) 2240.
14. Y. Teraoka, I. Nishiyama, J. Appl. Phys. 79 (1996) 4397.
15. Y. Teraoka, I. Nishiyama, J. Appl. Phys. 82 (1997) 3137.
16. H. Doshita, K. Ohtani, A. Namiki, J. Vac. Sci. Technol. A16 (1998) 265.
17. H. Over, J. Wasserfall, W. Ranke, C. Ambiatello, R. Sawitzki, D. Wolf, W. Moritz, Phys. Rev. B 55 (1997) 4731.
18. R. Felici, I.K. Robinson, C. Ottaviani, P. Imperatori, P. Eng, P. Perfetti, Surf. Sci. 375 (1997) 55.
19. L. Favioli, M.G. Betti, C. Mariani, A.I. Shkrebtii, R.D. Sole, C. Cepek, A. Goldoni, S. Modesti, Surf. Sci. 377 (1997) 360.
20. T. Hashizume, S. Heike, M.I. Lutwyche, S. Watanabe, Y. Wada, Surf. Sci. 386 (1997) 161.
21. B.S. Swartzentruber, Surf. Sci. 386 (1997) 195.
22. Q. Gao, C.C. Cheng, P.J. Chen, W.J. Choyke, J.T. Yates Jr., J. Chem. Phys. 98 (1993) 8308.
23. J.J. Boland, Science 262 (1993) 1703.
24. K. Nakatsuji, K. Matsuda, T. Yonezawa, H. Daimon, S. Suga, Surf. Sci. 363 (1996) 321.
25. Q. Guo, D. Sterratt, E.M. Williams, Surf. Sci. 356 (1996) 75.
26. W. Yang, Z. Dohnálek, W.J. Choyke, J.T. Yates Jr, Surf. Sci. 392 (1997) 8.
27. I. Lyubinetsky, Z. Dohnálek, W.J. Choyke, J.T. Yates Jr, Phys. Rev. B 58 (1998) 7950.
28. G.A. de Wijs, A. Selloni, Phys. Rev. Lett. 77 (1996) 881.
29. G.A. de Wijs, A. De Vita, A. Selloni, Phys. Rev. Lett. 78 (1997) 4877.
30. G.A. de Wijs, A. De Vita, A. Selloni, Phys. Rev. B 57 (1998) 10021.
31. R. Car, M. Parrinello, Phys. Rev. Lett. 55 (1985) 2471.
32. M.C. Payne, M.P. Teter, D.C. Allan, T.A. Arias, J.D. Joannopoulos, Rev. Mod. Phys. 64 (1992) 1045.
33. G. Kresse, J. Hafner, Phys. Rev. B 47 (1993) 588.
34. G. Kresse, J. Hafner, Phys. Rev. B 49 (1994) 14251.
35. G. Kresse, J. Furthmuller, Comput. Mater. Sci. 6 (1996) 15.
36. G. Kresse, J. Furthmuller, Phys. Rev. B 54 (1996) 11169.
37. D.M. Ceperley, B.J. Alder, Phys. Rev. Lett. 45 (1980) 566.
38. D. Vanderbilt, Phys. Rev. B 41 (1990) 7892.
39. G. Kress, J. Furthmuller, J. Phys. Condens. Matter 6 (1994) 8245.
40. D.R. Lide, CRC Handbook of Chemistry and Physics, 75th edn, CRC Press, Boca Raton, 1995.
41. P. Kruger, J. Pollmann, Phys. Rev. Lett. 74 (1995) 1155.
42. P. Kruger, J. Pollmann, Phys. Rev. B 47 (1993) 1898.