SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1262-1266

Plasma diagnostics of r.f. PACVD of boron nitride using a BCl3-N2-H2-Ar gas mixture

(5) Schaffnit, C a Thomas, L a,b Rossi, F a Hugon, R a,c Pauleau, Y a,d

a JOINT RESEARCH CENTRE (Italy)

b UNIVERSITÉ DE PERPIGNAN (France)

c UNIVERSITÉ DE LORRAINE (France)

d GRENOBLE INSTITUTE OF TECHNOLOGY (France)

Author keywords

Boron nitride; Coatings; Plasma; Vapour deposition (PACVD)

Indexed keywords

EID: 0006724220 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00368-X Document Type: Article

Times cited : (13)

References (18)

1
- 0042203478
- PACVD of BN coatings: Effect of the experimental parameters on the structure of the films
- in press
- C. Schaffnit, L. Thomas, F. Rossi, R. Hugon, Y. Pauleau, PACVD of BN coatings: effect of the experimental parameters on the structure of the films, Surf. Coat Technol. in press.
- Surf. Coat Technol.
- Schaffnit, C.¹ Thomas, L.² Rossi, F.³ Hugon, R.⁴ Pauleau, Y.⁵

2
- 0000036569
- S. Reinke, M. Kuhr, W. Kulisch, R. Kassing, Diamond Relat. Mater. 4 (1995) 272-283.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 272-283
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³ Kassing, R.⁴

3
- 0007524079
- S.J. Harris, G.L. Doll, D.C. Chance, A.M. Weimer, Appl. Phys. Lett. 67 (16) (1995) 2314-2316.
- (1995) Appl. Phys. Lett. , vol.67 , Issue.16 , pp. 2314-2316
- Harris, S.J.¹ Doll, G.L.² Chance, D.C.³ Weimer, A.M.⁴

4
- 10444231200
- S. Bohr, R. Haubner, B. Lux, Diamond Relat. Mater. 4 (1995) 714-719.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 714-719
- Bohr, S.¹ Haubner, R.² Lux, B.³

5
- 0041703714
- C. Schaffnit, H. Del Puppo, R. Hugon, L. Thomas, F. Rossi, Y. Pauleau, Le Vide: Sci. Tech. Appl. (Suppl.) 275 (1995) 450-453.
- (1995) Le Vide: Sci. Tech. Appl. (Suppl.) , vol.275 , pp. 450-453
- Schaffnit, C.¹ Del Puppo, H.² Hugon, R.³ Thomas, L.⁴ Rossi, F.⁵ Pauleau, Y.⁶

6
- 0029386899
- A. Schütze, K. Bewilogua, H. Lüthje, S. Kouptsidis, S. Jäger, Surf. Coat. Technol. 7475 (1995) 717-722.
- (1995) Surf. Coat. Technol. , vol.7475 , pp. 717-722
- Schütze, A.¹ Bewilogua, K.² Lüthje, H.³ Kouptsidis, S.⁴ Jäger, S.⁵

7
- 0042204160
- Int. conf. on c-BN and diamond under reduced pressure, Jablonna, Poland
- in press
- M. Kuhr, R. Freudenstein, S. Reinke, W. Kulisch, G. Dollinger, A. Bergmaier, Int. Conf. on c-BN and Diamond under Reduced Pressure, Jablonna, Poland, J. Chem. Vap. Dep. in press.
- J. Chem. Vap. Dep.
- Kuhr, M.¹ Freudenstein, R.² Reinke, S.³ Kulisch, W.⁴ Dollinger, G.⁵ Bergmaier, A.⁶

8
- 0029675045
- C. Schaffnit, H. Del Puppo, R. Hugon, L. Thomas, P. Moretto, F. Rossi, Y. Pauleau, Surf. Coat. Technol. 80 (1996) 13-17.
- (1996) Surf. Coat. Technol. , vol.80 , pp. 13-17
- Schaffnit, C.¹ Del Puppo, H.² Hugon, R.³ Thomas, L.⁴ Moretto, P.⁵ Rossi, F.⁶ Pauleau, Y.⁷

9
- 0043206499
- Ph.D. Thesis, University of Limoges, France
- L. Thomas, Ph.D. Thesis, University of Limoges, France, 1993.
- (1993)
- Thomas, L.¹

10
- 0031485657
- L. Thomas, J.L. Jauberteau, I. Jauberteau, J. Aubreton, A. Catherinot, Plasma Chem. Plasma Process. 17 (2) (1997) 193-206.
- (1997) Plasma Chem. Plasma Process. , vol.17 , Issue.2 , pp. 193-206
- Thomas, L.¹ Jauberteau, J.L.² Jauberteau, I.³ Aubreton, J.⁴ Catherinot, A.⁵

11
- 0025486366
- R.N. Rudolph, J.H. Moore, Plasma Chem. Plasma Process. 10 (1990) 451.
- (1990) Plasma Chem. Plasma Process. , vol.10 , pp. 451
- Rudolph, R.N.¹ Moore, J.H.²

12
- 49449126367
- M. Capitelli, M. Dilonardo, E. Molinari, Chem. Phys. 20 (1977) 417-429.
- (1977) Chem. Phys. , vol.20 , pp. 417-429
- Capitelli, M.¹ Dilonardo, M.² Molinari, E.³

13
- 36749118714
- J. Dotan, W. Lindinger, J. Chem. Phys. 76 (1982) 4972-4977.
- (1982) J. Chem. Phys. , vol.76 , pp. 4972-4977
- Dotan, J.¹ Lindinger, W.²

14
- 0022732969
- G. Bruno, P. Capezzuto, G. Cicala, F. Cramarossa, Plasma Chem. Plasma Process. 6 (2) (1986) 109-125.
- (1986) Plasma Chem. Plasma Process. , vol.6 , Issue.2 , pp. 109-125
- Bruno, G.¹ Capezzuto, P.² Cicala, G.³ Cramarossa, F.⁴

15
- 0026154090
- P. Rahmati, F. Arefi, J. Amouroux, Surf. Coat. Technol. 45 (1991) 369-378.
- (1991) Surf. Coat. Technol. , vol.45 , pp. 369-378
- Rahmati, P.¹ Arefi, F.² Amouroux, J.³

16
- 0004414830
- J. Cairns, R. Smailes, D. Blaikley, P. Banks, G. Hancock, I. Hussia, W. Katzschner, Mater. Res. Soc. Symp. Proc. 98 (1987) 121-127.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.98 , pp. 121-127
- Cairns, J.¹ Smailes, R.² Blaikley, D.³ Banks, P.⁴ Hancock, G.⁵ Hussia, I.⁶ Katzschner, W.⁷

17
- 0042204159
- JANAF Tables, 1982.
- (1982) JANAF Tables

18
- 0004292174
- Academic Press
- D.M. Manos, D.L. Flam, Plasma Etching, Academic Press, 1989.
- (1989) Plasma Etching
- Manos, D.M.¹ Flam, D.L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.