The effects of ion bombardment sputtering and atomic transport related roughening and smoothing on depth profiling resolution

Vacuum

Volumn 47, Issue 5, 1996, Pages 409-420

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; MATHEMATICAL MODELS; SPUTTERING; SURFACE ROUGHNESS; THERMAL EFFECTS;

ATOMIC TRANSPORT; RANDOM ATOMIC REMOVAL; SPUTTER DEPTH PROFILING RESOLUTION; STEADY STATE SURFACE ROUGHENING; STEADY STATE SURFACE SMOOTHING;

ION BOMBARDMENT;

EID: 0030150403     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(95)00239-1     Document Type: Article

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