Calculated elemental sputter yield correction factor in quantitative Auger electron spectroscopy - a poor approximation

Surface and Interface Analysis

Volumn 25, Issue 5, 1997, Pages 330-334

  Malherbe, Johan B ^a   Odendaal, R Quintin ^a  

^a UNIVERSITY OF PRETORIA   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ATOMS; ION BOMBARDMENT; SEMICONDUCTOR MATERIALS; SURFACE STRUCTURE;

COMPOUND SEMICONDUCTOR; SPUTTER YIELD CORRECTION FACTOR;

AUGER ELECTRON SPECTROSCOPY;

EID: 0031143020     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199705)25:5<330::AID-SIA240>3.0.CO;2-R     Document Type: Article

References (22)