Stress analysis of selective epitaxial growth of GaN

Applied Physics Letters

Volumn 74, Issue 21, 1999, Pages 3122-3124

  Liu, Q K K ^a   Hoffmann, A ^b   Siegle, H ^b   Kaschner, A ^b   Thomsen, C ^b   Christen, J ^c   Bertram, F ^c  

^a HAHN MEITNER INSTITUT   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; CONTINUUM MECHANICS; ELASTIC MODULI; MICROSCOPIC EXAMINATION; RAMAN SPECTROSCOPY; STRESS ANALYSIS; STRESS CONCENTRATION; STRESS RELAXATION; TENSILE STRESS;

GALLIUM NITRIDE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0032622017     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124082     Document Type: Article

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