A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 410-414

  Logothetidis, S ^a   Charitidis, C ^a   Patsalas, P ^a   Kehagias, Th ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

BN phases; Ellipsometry; Hardness; Infra red

Indexed keywords

BORON COMPOUNDS; CHEMICAL BONDS; COMPOSITION EFFECTS; ELASTICITY; ELECTRIC POTENTIAL; ELLIPSOMETRY; HARDNESS; ION BEAMS; MAGNETRON SPUTTERING; MORPHOLOGY; NITRIDES; SPUTTER DEPOSITION;

ION BEAM SPUTTERING; NANOINDENTATION;

PROTECTIVE COATINGS;

EID: 0032614362     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00434-8     Document Type: Article

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