EFFECT OF HIGH TEMPERATURE AND e-BEAM IRRADIATION ON THE STABILITY OF REFRACTORY THIN FILMS.

J Vac Sci Technol

Volumn 14, Issue 1, 1976, Pages 223-226

  Lee, Eal H ^a   Poppa, Helmut ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

REFRACTORY MATERIALS;

EID: 0016911801     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (13)