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Volumn 75, Issue 14, 1999, Pages 2111-2113

Topographic and electronic studies of wedge-shape surface defects on AiGaAs/GaAs films grown on ge substrates

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL DEFECTS; ELECTROSTATICS; FERMI LEVEL; MICROSCOPIC EXAMINATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SURFACE TOPOGRAPHY;

EID: 0032606863     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124933     Document Type: Article
Times cited : (12)

References (17)
  • 7
    • 33745604763 scopus 로고
    • M. Nonnenmacher, M. P. O'Boyle, and H. K. Wickramasinghe, Appl. Phys. Lett. 58, 2921 (1991); J. M. R. Weaver and D. W. Abraham, J. Vac. Sci. Technol. B 9, 1559 (1991).
    • (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 1559
    • Weaver, J.M.R.1    Abraham, D.W.2
  • 12
    • 0041608838 scopus 로고    scopus 로고
    • On sample A, both the average length of the pair defects and the average pair separation between the outside edges are measured to be (1.02 ±0.02) μm. On sample B, the number is (1.63±0.04) μm.
    • On sample A, both the average length of the pair defects and the average pair separation between the outside edges are measured to be (1.02 ±0.02) μm. On sample B, the number is (1.63±0.04) μm.
  • 13
    • 0041608854 scopus 로고    scopus 로고
    • The average depth of the deeper pits on sample A is (35±10) nm.
    • The average depth of the deeper pits on sample A is (35±10) nm.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.