CARAMEL: Contamination And Reliability Analysis of MicroElectromechanical Layout

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 309-318

  Kolpekwar, Abhijeet ^a   Jiang, Tao ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DEFECTS; RESONATORS;

MICRORESONATORS; SOFTWARE PACKAGE CARAMEL;

MICROELECTROMECHANICAL DEVICES;

EID: 0032594994     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788635     Document Type: Article

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