Micromechanical relay with a thermally-driven mercury micro-drop

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 515-520

  Simon, Jonathan ^a   Saffer, Scott ^a   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RESISTANCE; ELECTRODES; FABRICATION; MERCURY (METAL); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSORS;

CONTACT RESISTANCE; ELECTROSTATIC RELAYS; MICROMECHANICAL RELAYS; MICRORELAYS; THERMALLY DRIVEN MERCURY MICRODROP;

ELECTRIC RELAYS;

EID: 0029732158     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)