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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 231-235

Characterization of high nitrogen content carbon nitride thin films by RBS and infrared techniques

(6) Mendez J M a Gaona Couto, A a Andrade, E a Pineda, J C a Zavala, E P a Muhl, S a

a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

Author keywords

Carbon nitride; Chemical composition; IBA techniques; Infrared spectroscopy; Thin film growth

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; DENSITY (SPECIFIC GRAVITY); ELLIPSOMETRY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS;

CARBON NITRIDE; PROFILOMETRY;

NITRIDES;

EID: 0032017651 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00850-1 Document Type: Article

Times cited : (8)

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