Characterization of helium/argon working gas systems in a radiofrequency glow discharge atomic emission source. Part I: Optical emission, sputtering and electrical characteristics

Spectrochimica acta, Part B: Atomic spectroscopy

Volumn 53 B, Issue 6-8, 1998, Pages 1181-1196

  Christopher, Steven J ^a   Hartenstein, Matthew L ^a   Marcus, R Kenneth ^a   Belkin, Mikhail ^a   Caruso, Joseph A ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRON ENERGY LEVELS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HELIUM; LIGHT EMISSION; PARTIAL PRESSURE; PLASMA DIAGNOSTICS; PRESSURE EFFECTS; SPUTTERING;

MIXED-GAS PLASMAS; RADIOFREQUENCY GLOW DISCHARGE ATOMIC EMISSION SPECTROSCOPY;

ATOMIC SPECTROSCOPY;

EID: 0032490406     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(98)00175-X     Document Type: Article

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