Effects of limiting orifice (anode) geometries on charged particle characteristics in an analytical radiofrequency glow discharge as determined by langmuir, current and voltage probes

Journal of Analytical Atomic Spectrometry

Volumn 12, Issue 1, 1997, Pages 33-41

  Ye, Yuancai ^a   Marcus, R Kenneth ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

Atomic emission spectrometry; Langmuir probe; Plasma characteristics; Radiofrequency glow discharge

Indexed keywords

ANODES; CHARGED PARTICLES; ELECTRON DENSITY MEASUREMENT; ELECTRON ENERGY ANALYZERS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; ORIFICES; PRESSURE EFFECTS; PROBES; TEMPERATURE MEASUREMENT;

ATOMIC EMISSION SPECTROSCOPY; LANGMUIR PROBES; RADIOFREQUENCY GLOW DISCHARGES;

ATOMIC SPECTROSCOPY;

EID: 0030784754     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/a606346b     Document Type: Article

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