Optimization of discharge parameters for a flat-type radio-frequency glow discharge source coupled to a quadrupole mass spectrometer system

Applied Spectroscopy

Volumn 50, Issue 4, 1996, Pages 454-466

  Shick Jr , Charles R ^a   Marcus, R Kenneth ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

Ion source; Mass spectrometry; Quadrupole mass filter; Radio frequency glow discharge

Indexed keywords

GLOW DISCHARGES; ION SOURCES; IONS; MASS SPECTROMETERS;

QUADRUPOLE MASS FILTER; RADIO FREQUENCIES;

MASS SPECTROMETRY;

EID: 0030113961     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702963906005     Document Type: Article

References (57)

1. W. W. Harrison, K. R. Hess, R. K. Marcus, and F. L. King, Anal. Chem. 58, 341A (1986).
2. J. W. Coburn and E. Kay, Appl. Phys. Lett. 19, 350 (1971).
3. J. W. Coburn and E. Kay, J. Appl. Phys. 43, 4965 (1972).
4. J. W. Coburn, E. Taglauer, and E. Kay, J. Appl. Phys. 45, 1779 (1975).
5. J. W. Coburn and E. Kay, Appl. Phys. Lett. 18, 435 (1971).
6. W. W. Harrison and C. W. Magee, Anal. Chem. 46, 461 (1974).
7. C. G. Bruhn, B. C. Bentz, and W. W. Harrison, Anal. Chem. 50, 373 (1978).
8. J. W. Coburn and W. W. Harrison, Appl. Spectrosc. Rev. 17, 95 (1981).
9. J. E. Cantle, E. F. Hall, C. J. Shaw, and P. J. Turner, Int. J. Mass Spectrom. Ion Phys. 46, 11 (1983).
10. N. E. Sanderson, E. F. Hall, J. Clark, P. Charalambous, and D. Hall, Mikrochim. Acta 1, 275 (1987).
11. M. W. Blades, Appl. Spectrosc. 48, 12A (1994).
12. D. Colodner, V. Salters, and D. C. Duckworth, Anal. Chem. 66, 1079A (1994).
13. Y. Mei and R. K. Marcus, Tr. Anal. Chem. 12, 86 (1993).
14. M. Van Straaten, K. Swenters, R. Gijbels, J. Verlinden, and E. Adriaenssens, J. Anal. At. Spectrom. 9, 1389 (1994).
15. R. C. Hutton and A. Raith, J. Anal. At. Spectrom. 7, 623 (1992).
16. W. Vieth and J. Huneke, Anal. Chem. 64, 2958 (1992).
17. D. M. P. Milton, R. C. Hutton, and G. A. Ronan, Fresenius' J. Anal. Chem. 343, 773 (1992).
18. Glow Discharge Spectroscopies, R. K. Marcus, Ed. (Plenum, New York, 1993).
19. B. N. Chapman, Glow Discharge Processes (John Wiley and Sons, New York, 1980).
20. W. W. Harrison, C. M. Barshick, J. A. Kingler, P. H. Ratliff, and Y. Mei, Anal. Chem. 62, 843A (1990).
21. M. Van Straaten and R. Gijbels, in Applications of Plasma Source Mass Spectrometry II, G. Holland and A. N. Eaton, Eds. (The Royal Society of Chemistry, Cambridge, 1993).
22. D. C. Duckworth, C. M. Barshick, and D. H. Smith, J. Anal. At. Spectrom. 8, 875 (1993).
23. D. C. Duckworth, C. M. Barshick, D. A. Bostick, and D. H. Smith, Appl. Spectrosc. 47, 243 (1993).
24. D. M. P. Milton and R. C. Hutton, Spectrochim. Acta 48B, 39 (1993).
25. G. K. Wehner, Adv. Electron. Electron. Phys. 7, 237 (1955).
26. G. S. Anderson, W. N. Mayer, and G. K. Wehner, J. Appl. Phys. 33, 2991 (1962).
27. G. N. Jackson, Thin Solid Films 5, 209 (1970).
28. H. Oechsner and W. Gerhard, Phys. Lett. A 40, 211 (1972).
29. H. Oechsner and W. Gerhard, Surf. Sci. 44, 480 (1974).
30. J. E. Geiger, M. Kipharski, H. Oechsner, and H. Paulus, Mikrochim. Acta 1, 497 (1987).
31. R. K. Marcus, T. R. Harville, Y. Mei, and C. R. Shick, Jr., Anal. Chem. 66, 902A (1994).
32. C. R. Shick, Jr., A. Raith, and R. K. Marcus, J. Anal. At. Spectrom. 9, 1045 (1994).
33. C. R. Shick, Jr., A. Raith, and R. K. Marcus, J. Anal. At. Spectrom. 8, 1043 (1993).
34. D. C. Duckworth and R. K. Marcus, J. Anal. At. Spectrom. 7, 711 (1992).
35. D. C. Duckworth and R. K. Marcus, Appl. Spectrosc. 44, 649 (1990).
36. D. C. Duckworth and R. K. Marcus, Anal. Chem. 61, 1879 (1989).
37. S. DeGendt, R. E. Van Grieken, S. K. Ohorodnik, and W. W. Harrison, Anal. Chem. 67, 1026 (1995).
38. S. K. Ohorodnik, S. DeGendt, S. L. Tong, and W. W. Harrison, J. Anal. At. Spectrom. 8, 859 (1993).
39. D. C. Duckworth, D. L. Donohue, D. H. Smith, T. A. Lewis, and R. K. Marcus, Anal. Chem. 65, 2478 (1993).
40. S. A. McLuckey, G. L. Glish, D. C. Duckworth, and R. K. Marcus, Anal. Chem. 64, 1606 (1992).
41. D. P. Myers, M. J. Heintz, P. P. Mahoney, and G. M. Hieftje, Appl. Spectrosc. 48, 1337 (1994).
42. R. K. Marcus, P. R. Cable, D. C. Duckworth, M. V. Buchanan, J. M. Pochkowski, and R. R. Weller, Appl. Spectrosc. 46, 1327 (1992).
43. C. R. Shick, Jr., R. K. Marcus, D. C. Duckworth, D. H. Smith, and D. Wheeler, Anal. Chem., paper submitted for publication.
44. M. Saito, Anal. Chim. Acta 274, 327 (1993).
45. N. Jakubowski, D. Stuewer, and G. Toelg, Int. J. Mass Spectrom. Ion Phys. 71, 183 (1986).
46. F. L. King, A. L. McCormack, and W. W. Harrison, J. Anal. At. Spectrom. 3, 883 (1988).
47. S. K. Ohorodnik and W. W. Harrison, Anal. Chem. 65, 2542 (1993).
48. Technical Staff, Fisons Instruments, Elemental, personal communications.
49. C. Lazik and R. K. Marcus, Spectrochim. Acta 47B, 1309 (1992).
50. W. Grimm, Spectrochim. Acta 39B, 443 (1984).
51. H. Hotop and A. Niehaus, Z. Phys. 228, 68 (1969).
52. R. Clampitt and D. K. Jefferies, Nature 226, 141 (1970).
53. C. R. Shick, Jr., and R. K. Marcus, "Analysis of Nominally Flat Samples By Radio Frequency Powered GDMS", Talk MOF 11:30, Presented at the 43rd ASMS Conference on Mass Spectrometry and Allied Topics, Atlanta, Georgia (1995).
54. F. L. King and W. W. Harrison, Int. J. Mass Spectrom. Ion Proc. 89, 171 (1989).
55. M. Parker and R. K. Marcus, Spectrochim. Acta 50B, 617 (1995).
56. C. R. Shick, Jr., R. K. Marcus, and J. C. Sharpe, "Versatile Ion Source Designs for Radio Frequency GDMS on the VG GloQuad", Poster ThP55, Presented at the 1994 Winter Plasma Conference on Plasma Spectrochemistry, San Diego, California (1994).
57. W. Vieth and J. C. Huneke, Spectrochim. Acta 46B, 137 (1991).