The use of different plasma gases (Ar, N2 and air) for CMP-OES: Figures of merit and temperature measurements

Fresenius' Journal of Analytical Chemistry

Volumn 355, Issue 3-4, 1996, Pages 242-243

  Bings, N H ^a   Broekaert, J A C ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4043145131     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s0021663550242     Document Type: Article

References (9)

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6. Kornblum G, De Galan L (1974) Spectrochim Acta 29B:249
7. Boumans PWJM (1987) Inductively coupled plasma emission spectroscopy, Part 2. Wiley, New York
8. Handbook of Chemistry and Physics, 75th edn (1994) CRC Press, New York
9. Bockasten K (1963) J Opt Soc Am 51:943