Characterization of helium/argon working gas systems in a radiofrequency glow discharge atomic emission source. Part II: Langmuir probe and emission intensity studies for Al, Cu and Macor samples

Spectrochimica acta, Part B: Atomic spectroscopy

Volumn 53 B, Issue 6-8, 1998, Pages 1197-1208

  Belkin, Mikhail ^a   Caruso, Joseph A ^a   Christopher, Steven J ^a   Marcus, R Kenneth ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARRIER CONCENTRATION; COPPER; ELECTRON ENERGY LEVELS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; PLASMA DIAGNOSTICS; PRESSURE EFFECTS; SPUTTERING;

LANGMUIR PROBE; RADIOFREQUENCY GLOW DISCHARGE ATOMIC EMISSION SPECTROSCOPY;

ATOMIC SPECTROSCOPY;

EID: 0032490408     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(98)00176-1     Document Type: Article

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